Inclination- Acceleration and Vibration Sensors


  • Long-term stabilities up to ±0,067% FS / 0,036°/ 0,67mg (10 years)
  • Repeatability < 0,01%FS, 0,01° / 0,18mg
  • Resolutions up to ± 0.0015% / 0,00075° /  7µg (bei 1Hz)
  • Temperature dependencies up to ±0,002°/°C
  • shock resistance of the pendulum min. 50’000g



The sensing mass, a pendulum made of single crystal silicon, is hermetically sealed inside a cavity made of silicon and glass. The movement auf the sensing mass is detected with capacitive principle. Single crystal silicon has higher elasticity then metal. Even after high shocks the sensing mass always goes back to the initial position. The result is an extremely high repeatability (up to 0,01% FS) and long-term stability (e.g. 0,036° drift after 10 years)

The symmetric construction of sensing mass and sensing element provides very low temperature dependencies. Due to the pure silicon and glass structure the repeatability after temperature changes is extremely high. Additional temperature compensation allows accuracies of up to 0,02% FS.

The sensing mass is gas damped. This reduces vibration and avoids overshooting and resonance frequency effects. For Inclination measurement high gas damped sensing elements (=SE) provide excellent filtering of Vibrations. For Acceleration and Vibration applications there are Sensing Elements with less damping provided for measuring up to kHz range.

Technology Data sheet

Measuring Principle:


The sensing mass is bending under Inclination or Acceleration (Vibration as well). The distances to the inner surface of the surrounding cavity are detected in capacitive way. This mechanical principle provides linear signal for Acceleration/Vibration measuring.

For inclination measuring the following sine function describes the output signal.